Confocal sensors for high precision distance, roughness & thickness measurements

confocalDT IFS2407 sensors are designed for high precision measurement of distance, roughness and thickness. These confocal chromatic sensors offer a high numerical aperture, a small light spot diameter and tolerate large tilt angles, which means that the sensors can also be used for roughness measurements. In addition, the sensors impress with nanometer accuracy.

confocalDT IFS2407-0,1

  • Measuring range (mm): 0.1
  • Linearity: max. 0.05 µm
  • Resolution: max. 3 nm
  • Ideal for distance and roughness measurements
  • Light-intensive sensor variant for high speed processes available (NA 0.7)
  • Small measurement spot size: 3 µm
  • High sensitivity and large tilt angle
  • Thickness measurement of transparent objects from 5 µm

confocalDT IFS2407-0,8

  • Measuring range (mm): 0.8
  • Linearity: max. 0.2 µm
  • Resolution: max. 24 nm
  • Small light spot
  • Space-saving sensor design
  • Precise distance measurements even on curved surfaces
  • Ideal for thickness measurements of thin layers

confocalDT IFS2407-3

  • Measuring range (mm): 3
  • Linearity: max. 0.75 µm
  • Resolution: max. 20 nm
  • Large offset distance approx. 28 mm
  • Max. tilt angle ± 30°
  • Ideal for measurements on curved and reflecting surfaces

confocalDT IFS2407/90-0,3

  • Measuring range (mm): 0.3
  • Linearity: max. 0.75 µm
  • Resolution: max. 10 nm
  • Ideal for displacement and roughness measurements
  • Small measurement spot size: 6 µm
  • High sensitivity and large tilt angle

HEADQUARTER MICRO-EPSILON AMERICA
8120 Brownleigh Dr.
Raleigh, NC 27617
me-usa@micro-epsilon.com
919 787 9707
919 787 9706