Contact
Downloads

interferoMETER IMS5420-TH

High precision thickness measurement of silicon wafers

White light interferometer for high precision wafer inspection

The IMS5420 is a high-performance white light interferometer for non-contact thickness measurement of monocrystalline silicon wafers. The controller has a broadband superluminescent diode (SLED) with a wavelength range of 1,100 nm. This enables the thickness measurement of undoped, doped and highly doped SI wafers with only one measuring system. The IMS5420 achieves a signal stability of less than 1 nm. The thickness can be measured from a distance of 24 mm.

logo

Characteristics

  1. Nanometer-accurate thickness measurement of undoped, doped and highly doped wafers
  2. Multi-peak: acquisition of up to 5 layers with an SI thickness of 0.05 up to 1.05 mm
  3. High resolution in z-axis of 1 nm
  4. Measuring rate up to 6 kHz for fast measurements
  5. Ethernet / EtherCAT / RS422 / PROFINET / EtherNet/IP
  6. Easy parameterization via web interface
[{"activity":"US_ME_R0-NCSC","address":"8120 Brownleigh Dr.\r\nRaleigh, NC 27617","central":false,"comment":"CT, DC, DE, MA, MD, ME,\r\nNH, NJ, NY, PA, RI, VT","companyName":"Micro-Epsilon America | East Regional Office","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1811},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1653},"mobile":"919 400 3845","name":"Efrain Arredondo","phone1":"919 787 9707","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9295,"type":null,"uid":116,"usStates":"14,15,32,31,29,40,41,43,51,53,59,16","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R2-Mid-West","address":"1246 Woburn Dr\r\nLemont, IL 60439","central":false,"comment":"IL: 600-619,\r\nIN, KY, MI, OH,\r\nPA: 150-167,\r\nWI: 530-539, 541-545, 549, \r\nWV","companyName":"Micro-Epsilon America | Mid West Regional Office","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"630 243-0997","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1812},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1663},"mobile":"847 420 4781","name":"Steve Sochowski","phone1":"630 243-0980","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9296,"type":null,"uid":117,"usStates":"23,24,27,33,47,51,64,63","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R3-West","address":"San Clemente, CA 92673","central":false,"comment":"AK, CA, HI, NV, OR, WA","companyName":"Micro-Epsilon America | Western Regional Office","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1813},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1654},"mobile":"","name":"Jerry Carayanis","phone1":"310 729 0954","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9297,"type":null,"uid":118,"usStates":"2,12,21,39,49,62","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R4-South","address":"Denver, CO 80227","central":false,"comment":"AZ, CO, IA, ID,\r\nIL: 620-629, \r\nKS, LA, MN, MO, MT, ND, NE, NM, OK, SD, TX, UT,\r\nWI: 540, 546-548, \r\nWY","companyName":"Micro-Epsilon America | Central Regional Office","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1814},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1655},"mobile":"919 412 3620","name":"Friedrich \u0022Fritz\u0022 Gebessler","phone1":"","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9299,"type":null,"uid":119,"usStates":"4,13,25,22,23,26,28,34,36,37,45,38,42,48,55,57,58,64,65","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R5-Southeast","address":"8120 Brownleigh Dr.\r\nRaleigh NC 27617","central":false,"comment":"AL, AR, FL, GA, MS, NC, \r\nSC, TN, VA","companyName":"Micro-Epsilon America | South East Regional Office","countries":"220","deZip":"","email":"tim.prentice@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1815},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1656},"mobile":"","name":"Tim Prentice","phone1":"919 649 9805","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9300,"type":null,"uid":120,"usStates":"1,5,18,19,35,44,54,56,61","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R6-Northern","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)","companyName":"Micro-Epsilon America | Northern California Direct Office","countries":"220","deZip":"","email":"holger.kopp@micro-epsilon.de","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":61872},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":61871},"mobile":"","name":"Holger Kopp","phone1":"984 888 6555","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9301,"type":null,"uid":305,"usStates":"12","website":"www.micro-epsilon.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"IL","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"815 520-0344","name":"Tim Fauser","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9245,"type":null,"uid":162,"usStates":"23","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_TandM-Instruments","address":"15902 Soleil Ct\r\nAustin, TX 78734","central":false,"comment":"LA, OK, TX","companyName":"T\u0026M Instruments","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"512-532-6130","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"T\u0026M Instruments","phone1":"512-772-1553","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9246,"type":null,"uid":171,"usStates":"28,48,57","website":"www.tandm.net","worldwide":true},{"activity":"USREP_Process-Technology_NM","address":"3301 Wellington Place\r\nFarmington, NM 87402","central":false,"comment":"NM","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"505 948 3302","name":"Josh Gordon","phone1":"","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9247,"type":null,"uid":169,"usStates":"42","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Process-Technology","address":"4084 South 300 West\r\nSalt Lake City, UT 84107","central":false,"comment":"ID, MT, UT, WY","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"385 322 3053","name":"Mike Hallenbeck","phone1":"801 264 1114","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9248,"type":null,"uid":168,"usStates":"22,37,58,65","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Analectro","address":"3219 Route 38, Suite 2\r\nMt. Laurel, NJ 08054","central":false,"comment":"DC, DE, MD, NJ\r\nPA: 168 - 196","companyName":"Analectro","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"856 795 4597","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Al Reithmeier, Kevin Corcoran","phone1":"856 795 6676","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9249,"type":null,"uid":154,"usStates":"16,15,31,41,51","website":"www.analectro.com","worldwide":true},{"activity":"USREP_Dempsco","address":"7015 Corporate Way\r\nDayton, OH 45459","central":false,"comment":"KY, IN, WV, \r\nOH: 430-433, 437-459\r\nPA: 150-167","companyName":"Dempsco","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"937 434 8860","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Kurt Jacoby, Chris Jacoby","phone1":"937 436 1000","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9250,"type":null,"uid":160,"usStates":"27,24,63,47,51","website":"www.dempsco.com","worldwide":true},{"activity":"USREP_Preferred_Technical_Resources","address":"28525 Beck Road, Suite 109\r\nWixom, MI 48393","central":false,"comment":"MI, OH: 434 - 436","companyName":"Preferred Technical Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"248 668 9059","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Philip Theaker, John Callaghan","phone1":"248 668 9051","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9251,"type":null,"uid":167,"usStates":"33,47","website":"www.ptrsales.com","worldwide":true},{"activity":"USREP_MCT_RAM","address":"2 W Main St, Suite 300\r\nVictor, NY 14564","central":false,"comment":"NY 120 - 123, 128 - 149","companyName":"MCT\/RAM - Corporate Office","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585 461 2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Saporito","phone1":"585 461 2110","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9252,"type":null,"uid":165,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_MCT_RAM1","address":"4 Marina Lane\r\nE. Patchogue, NY 11772","central":false,"comment":"NY 100 - 119, 124 - 127","companyName":"MCT\/RAM - Lower New York and New York City","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585-461-2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Gustafson","phone1":"631-286-7374","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9253,"type":null,"uid":166,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"WI: 530 - 539, 541 - 545, 549","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"414- 458-9325","name":"Jon Korus","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9254,"type":null,"uid":163,"usStates":"64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_IRI","address":"13774 Reimer Drive North \r\nMaple Grove, MN 55311","central":false,"comment":"IA, KS, MN, MO, ND, NE, SD,\r\nWI: 540, 546 - 548","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"952 797 0223","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Tony Marquette","phone1":"952 797 0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9255,"type":null,"uid":164,"usStates":"25,26,34,36,45,38,55,64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_Equipoise","address":"4059 N Haight Ave\r\nPortland, OR 97227-1332","central":false,"comment":"OR, WA","companyName":"Equipoise Technologies, LLC","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Ed Querfeld","phone1":"503 708 9969","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9256,"type":null,"uid":161,"usStates":"49,62","website":"www.equipoisetech.com","worldwide":true},{"activity":"USREP_CASECO","address":"508 Queens Court\r\nFranklin, TN 37064","central":false,"comment":"AL, AR, MS, TN\r\nFL: 324 - 325","companyName":"CASECO","countries":"220","deZip":"","email":"tim.prentice@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"615 591-7399","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"615 210-7311","name":"Tim DiPeri","phone1":"615 591-7399","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9257,"type":null,"uid":159,"usStates":"1,5,35,56,18","website":"www.caseco-inc.com","worldwide":true},{"activity":"USREP_CAL_Industrial_Sales_Co","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)\r\nNV: 892 - 898","companyName":"CAL Industrial Sales Co.","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Dave Richardson, Bob McCartney","phone1":"925 371 8125","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9258,"type":null,"uid":158,"usStates":"39,12","website":"www.calindustrial.com","worldwide":true}]
Contact
Micro-Epsilon USA Headquarters
Contact form
Your request for: {product}
* Mandatory fields
Click here to read our data privacy statement.

Precise wafer thickness measurement

Due to the optical transparency of silicon wafers in the wavelength range of 1,100 nm, the IMS5420 interferometers can precisely detect the thickness. In this wavelength range, both undoped silicon and doped wafers provide sufficient transparency. Therefore, wafer thicknesses up to 1.05 mm can be detected. The measurable thickness of the air gap is even up to 4 mm.

The IMS5420 interferometer enables the thickness measurement of undoped, doped and highly doped silicon wafers and thus offers a wide range of applications. This wafer thickness measuring system is ideal for the measurement of monocrystalline silicon wafers with a geometric thickness of 500 to 1050 µm and a doping of up to 6 m Ω cm. Even with highly doped wafers, thicknesses up to 0.8 mm can be measured. This results from the decreasing transparency with increasing doping.

Precise thickness measurement during lapping

In wafer fabrication, a crystalline silicon ingot is cut into thin slices of about 1 mm. The discs are then ground and lapped to obtain the desired thickness and surface finish. To achieve high process stability, interferoMETERs are used for inline thickness measurement in lapping and grinding machines. Due to its compact design, the sensor can also be integrated in confined installation spaces. The thickness values are used for machine control as well as for quality control of the wafer.

Model Measuring range /
Start of measuring range
Linearity Number of measurable layers Fields of application
IMS5420-TH24     0.05 ... 1.05 mm (for silicon, n=3.82)
0.2 ... 4 mm (for air, n=1) / approx. 24 mm with a working range of approx. 6 mm
< ±100 nm 1 layer Inline thickness measurement, e.g. after grinding or polishing.
IMS5420MP-TH24 < ±100 nm for one layer
< ±200 nm for additional layers
up to 5 layers Inline thickness measurement, e.g. for quality control of the coating thickness after coating
IMS5420/IP67-TH24 < ±100 nm 1 layer Industrial inline thickness measurement during lapping and grinding

 

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.

Tutorials