interferoMETER IMS5400-DS

Absolute distance measurements with maximum precision

White light interferometer for absolute distance measurement with nanometer accuracy

The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.



  1. Nanometer-precise, absolute distance measurements, suitable for step profiles
  2. Multi-peak distance measurement of transparent objects
  3. Compact and robust sensors with large offset distance
  4. Measuring rate up to 6 kHz for high speed measurements
  5. Robust controller with passive cooling
  6. Easy configuration via web interface
  7. Compact sensors also with 90° beam path
Micro-Epsilon Messtechnik
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Absolute distance measurement with nanometer resolution

The IMS5400-DS is used for high-precision displacement and distance measurements. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.

Multi-peak distance measurement

With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. For example, the distance between glass and a carrier plate can be determined. In addition, the controller can calculate the glass thickness based on the distance values.

Ideal for industrial environments

Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and can also be integrated in confined spaces. Highly flexible fiber optic cables are available in lengths up to 10 m and allow a spatial separation of sensor and controller. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.

Small light spot for the smallest of details and structures

The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturized electronic components.

Measuring multiple surfaces

The interferometric measuring method enables measurements on numerous surfaces. This allows high-precision distance measurements on reflecting metals, plastics and glass.

NEW: Sensors also with 90° beam path

Due to their compact size, these sensors can also be integrated into restricted spaces. In particular, the models with 90° beam path require significantly less required installation space.

Numerous models for demanding measurement tasks

Model Measuring range /
Start of measuring range
Linearity Number of measurable layers
Fields of application
IMS5400-DS0,5/90/VAC 1,5 mm /approx. 0,5 mm ± 50nm - High-precision distance measurement in a clean room environment and vacuum, e.g. measurement on coated wafers.
Non-magnetic titanium UHV variant enables use in strong magnetic fields, e.g. in medical technology (nuclear spinning or electron beam microscope)
IMS5400-DS10/90/VAC 1,5 mm / 10 mm
IMS5400-DS19 2.1 mm / approx. 19 mm ±50 nm - Industrial distance measurements e.g. in precision manufacturing
IMS5400-DS19/VAC Precise positioning tasks and distance measurements in clean room environments and vacuum e.g. in display production for mask positioning
IMS5400MP-DS19 Distance measurement:
2.1 mm / approx. 19 mm
Thickness measurement:
0.01 ... 1.3 mm (for BK7, n=1.5) / approx. 19 mm
±50 nm for the first distance
±150 nm for each further distance
Up to 13 layers Industrial distance and thickness measurement e.g. in flat glass production
IMS5400MP-DS19/VAC Precise distance and thickness measurement in clean room environments and vacuum e.g. in display production for distance and gap measurement

Interface and signal processing units

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.