interferoMETER 5600-DS

Absolute distance measurements with subnanometer resolution

White light interferometer for absolute distance measurement with subnanometer resolution

The new white light interferometer IMS5600-DS is used for distance measurements with highest precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest accuracy requirements, e.g., in electronics and semiconductor production.



  1. Distance measurement with subnanometer precision
  2. Best-in-Class: Resolution 30 picometers
  3. Absolute measurement, suitable for step profiles
  4. Compact and robust sensors with large offset distance
  5. Measuring rate up to 6 kHz for high speed measurements
  6. Easy configuration via web interface
  7. Sensors and cables suitable for vacuum
  8. Compact sensors also with 90° beam path
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Absolute distance measurement with large measuring range and offset distance

The IMS5600-DS is used for high-precision displacement and distance measurements. The system provides absolute measurement values and can therefore also be used for distance measurement of step profiles. Thanks to the absolute measurement, steps are sampled with high signal stability. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected. The measuring system offers sub-nanometer resolution with a large offset distance in relation to the measuring range.


Multi-peak distance measurement

With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. For example, the distance between glass and a carrier plate can be determined. The controller can then calculate the glass thickness from the distance values.

Designed for high-resolution distance measurements in vacuum

IMS5600-DS interferometers can be used for measurement tasks in vacuum environments and clean rooms where the interferometers achieve a resolution in the subnanometer range. For vacuum applications, Micro-Epsilon offers special sensors, cables and feed-through accessories. These sensors and cables are particle-free to a high degree and can be used from clean rooms to UHV.

Stable distance measurements with highest precision

The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results thanks to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and have highly flexible fiber optic cables. Cable lengths up to 10 m allow a spatial separation of sensor and controller. The sensor can be aligned easily and quickly due to the integrated pilot laser. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.

Measurement on multiple surfaces

The interferometric measuring method allows measurements on numerous surfaces. This enables high-precision distance measurements on reflecting metals, plastics and glass.

NEW: Sensors also with 90° beam path

Due to their compact size, these sensors can also be integrated into restricted spaces. In particular, the models with 90° beam path require significantly less required installation space.

Numerous models for demanding measurement tasks

Model Measuring range /
Start of measuring range
Linearity Number of measurable layers Fields of application
IMS5600-DS0,5/90/VAC 1,5 mm /approx. 0,5 mm ±10 nm - High-precision distance measurement in a clean room environment and vacuum, e.g. measurement on coated wafers.
Non-magnetic titanium UHV variant enables use in strong magnetic fields, e.g. in medical technology (nuclear spinning or electron beam microscope)
IMS5600-DS10/90/VAC 1,5 mm / 10 mm
IMS5600-DS19 2.1 mm / approx. 19 mm ±10 nm - High precision distance measurements in industrial processes e.g. in precision manufacturing
IMS5600-DS19/VAC Precise positioning tasks and distance measurements in clean room environments and vacuum e.g. in display production for mask positioning
IMS5600MP-DS19 Distance measurement:
2.1 mm / approx. 19 mm
Thickness measurement:
0.01 ... 1.3 mm (for BK7, n=1.5) / approx. 19 mm
±10 nm for the first distance
±100 nm for each further distance
Up to 13 layers High-precision distance and thickness measurements in industrial processes e.g. in semiconductor production for determining layer thicknesses on wafers or in LED manufacturing
IMS5600MP-DS19/VAC High-precision distance and thickness measurements in clean room environments and vacuum e.g. in semiconductor production for measuring position and gap dimensions on masks and wafers

Interface and signal processing units

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.