Sensors for displacement, distance and position

Eddy current sensors from Micro-Epsilon are designed for non-contact measurement of displacement, distance, position, oscillation and vibrations. They are particularly suitable when high precision is required in harsh industrial environments (pressure, dirt, temperature).

Capacitive sensors from Micro-Epsilon perform non-contact measurements of displacement, distance and position of electrically conductive targets with high precision.

optoNCDT sensors have set milestones for industrial laser displacement measurement. Whether for displacement, distance or thickness measurement, Micro-Epsilon laser sensors are considered one of the best in their class. These laser sensors are used e.g. in measurement and monitoring tasks in factory automation, electronics production, robotics and vehicle construction.

The confocalDT sensors product range stands for the highest precision and dynamics in confocal chromatic measurement technology. These sensors enable high-precision and fast measurements for both distance and thickness measurements of transparent objects. In addition, innovative controller and sensor technologies ensure high signal stability on all surfaces. The high-performance sensor portfolio enables the solution of a wide range of measurement tasks, e.g., in flat glass production, in measuring machines and in semiconductor machine construction. 

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 4 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution. The IMS5420-TH is used for wafer thickness measurement.

Laser distance sensors are designed for non-contact distance measurements: laser gauges for measuring ranges up to 10m, laser distance sensors for up to 270m. These sensors are used for positioning and type classification in machine building and handling equipment.

Micro-Epsilon offers a large range of inductive sensors for displacement and position measurement from conventional LVDT sensors and inductive sensors with integrated controller to customer-specific high-volume versions. The induSENSOR displacement sensors from Micro-Epsilon are used in automated processes, quality assurance, test rigs, hydraulics, pneumatic cylinders and automotive engineering.

mainSENSOR is based on an innovative measuring principle, which has been developed by Micro-Epsilon in order to combine the advantages of both inductive and magnetic sensors. Magneto-inductive sensors are frequently used as alternative to inductive sensors and proximity sensors in process automation, the packaging industry and in machine monitoring.

Draw-wire sensors of the wireSENSOR series measure almost linearly over the entire measuring range and are used for distance and position measurements between 50 mm and 50,000 mm. Draw-wire sensors from Micro-Epsilon are ideal for both direct integration and subsequent assembly in serial OEM applications, e.g., in medical devices, lifts, conveyors and automotive engineering.