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Fast steering mirrors


Outstanding combination of dynamism & tilt angle

Compact design, large mirror (Ø 20 mm)

Robust & stable in aerospace, defense & industry

Dynamic fast steering mirrors for precise laser beam steering

Fast steering mirrors (FSM) from Micro-Epsilon are miniaturized tilting mirrors that are used for precisely deflecting light or laser beams. The FSM3000 models combine superior precision with maximum dynamism. They are easy to integrate and very robust, which is why they are used, among other things, for satellite communication in space. A powerful voice-coil actuator and high-resolution embedded coil eddy current sensors allow for ultra-precise movements and a wide tilt angle. Thanks to the excellent mirror quality, the FSM meets the strictest optical standards. Series-optimized for high quantities – ideal for applications in industry, optics and aerospace & defense.

Discover the new benchmark for dynamic beam guidance now.

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Special features

  1. Large tilt angle of ±1.5°
  2. High dynamism with outstanding control behavior up to 1.5 kHz
  3. Large precision mirror (Ø 20 mm) with high reflectivity for lower optical losses
  4. High-resolution position measurement < 0.7 µrad
  5. Extremely compact and robust thanks to voice coil and patented sensor technology
  6. Suits almost all environments: aerospace & defense, optics & industry
  7. Proven performance in series use in satellite communication
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Large tilt angle with high dynamism

The Fast Steering Mirrors from Micro-Epsilon are based on innovative voice coil technology and achieve an impressive maximum frequency of 2 kHz, which is comparable to piezo-controlled systems but much more robust. They therefore react extremely quickly and are ideally suited for dynamic applications. At the same time, the large range of motion of the mirror of ±1.5° allows for additional degrees of freedom as well as flexible use options while maintaining a high level of accuracy.

Maximum precision in two axes (tip/tilt)

The Fast Steering Mirror can be controlled precisely in two axes. The position of the mirror is continuously detected by four integrated eddy current sensors, while four actuator coils perform the corresponding movement precisely. Two opposing sensors and actuators together form a defined axis of measurement and rotation. A central point of rotation ensures backlash-free, wear-free and synchronized movement, maximum accuracy and dynamism during operation.

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Stable mirror positioning and optimal reflection properties

Fast steering mirrors are used, among other things, for optical communication and must therefore achieve stable data transmission with high signal quality. To maximize the transmission power, the FSM3000 models use supremely flat mirrors with excellent reflection properties (dielectric > 99.3% at 1550 nm). At the same time, the system design in combination with the robust sensor technology allows for a stable mirror position that is easy to adjust, without being influenced by the environment.

Small, lightweight and robust

With the perfect interplay between materials, technology concept and sensor engineering, all components of the FSM3000 are extremely robust. The fast tilting mirror systems also boast a very compact size and weigh just 55 grams. This not only makes them easy to integrate, but also extremely durable. For example, they can withstand the heavy shocks and vibrations during a rocket launch for satellites and are very precise and reliable when in orbit.

Intelligent system design – easy to integrate

The FSM3000 tilting mirrors are quick and easy to integrate both mechanically and electrically. In addition to the small size and low weight, the integrated cable of the sensor electronics with a 16-pin connector and the lateral fastening holes simplify mechanical installation. The sensor only needs 5 V of electricity and the actuator system only needs 115 mW of power (at maximum, nominal deflection of 1.5°).

Wide performance range – from catalog to OEM

Micro-Epsilon offers a wide range of standard mirrors (COTS), customer-specific adaptations (MOTS) and developments for OEM series applications in the FSM3000 series. Thanks to state-of-the-art technologies and efficient processes, economical complete solutions are also possible even for the most stringent manufacturing requirements.

Typical adaptations for OEM applications

  • Mirror diameter
  • Coating (depending on required laser power)
  • Sensor electronics (form factor)
  • Leaded versions for space / lead-free for industrial applications
  • Flexible cable length
  • Mounting interface

Mirror tilting with ultra-precise sensors from Micro-Epsilon

In addition to ready-made fast steering mirrors, Micro-Epsilon also offers special eddy current systems for ultra-precise mirror tilt measurements. For this application, we have built and delivered four-channel systems for direct system integration or integration in fast steering mirrors to our customers for many years now. 

These systems are particularly well suited for steering larger mirrors or when there are special requirements for the mirror positioning.

Fields of application

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