The introduction of the international standard ISO 9283 demands new non-contacting measurement methods. The measurement system for the position measurement is composed of a measurement cube with a defined weight, a sensor and a support. The sensor is equipped with six U15 eddy current sensors. During the measurement the robot moves the measurement cube into the sensor range. The data from the eddy current sensors is passed via a fast interface to the PC where it is processed. Measurement inaccuracies due to linearity and tilting errors (parallelism between the sensor and measurement object) and thermal effects are additionally compensated in the measurement software.