Bow and warp of wafers

Confocal chromatic sensors scan the wafer surface to detect bow, warp and distortion. Providing a measuring rate of 70 kHz, confocalDT controllers enable highly dynamic measurements, allowing the wafer to be inspected within short cycle times.

Micro-Epsilon Messtechnik
Königbacher Str. 15
94496 Ortenburg, Germany
info@micro-epsilon.com
+49 8542 / 168 - 0
+49 8542 / 168 - 90