boreCONTROL is designed for the inspection of small bore holes from ø4 mm. The measurement system consists of a sensor with integrated rotary drive, a motor controller, a sensor controller ...
Confocal chromatic sensors scan the wafer surface to detect bow, warp and distortion. Providing a measuring rate of 70 kHz, confocalDT controllers enable highly dynamic measurements, allowing the wafer to be inspected within short cycle times.
+49 8542 / 168 - 0
Micro-Epsilon MesstechnikKönigbacher Str. 15
94496 Ortenburg, Germanyinfo@micro-epsilon.com+49 8542 / 168 - 0+49 8542 / 168 - 90