boreCONTROL is designed for the inspection of small bore holes from ø4 mm. The measurement system consists of a sensor with integrated rotary drive, a motor controller, a sensor controller ...
Confocal chromatic sensors scan the wafer surface to detect bow, warp and distortion. Providing a measuring rate of 70 kHz, confocalDT controllers enable highly dynamic measurements, allowing the wafer to be inspected within short cycle times.
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