Displacement sensor for nanopositioning tasks
Very small displacements, both static and dynamic, are normally generated by piezo actuators. High precision displacement sensors ensure that these displacements are measured to the required nanometer and sub-nanometer accuracies. Resolution and repeatability of up to 0.04nm are possible. Non-contact, capacitive displacement sensors from Micro-Epsilon provide this sub-nanometer precision. The capaNCDT series combines high precision and the required stability.