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interferoMETER IMS5400-DS

Absolute distance measurements with maximum precision

White light interferometer for absolute distance measurement with nanometer accuracy

The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.

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Characteristics

  1. Nanometer-precise, absolute distance measurements, suitable for step profiles
  2. Multi-peak distance measurement of transparent objects
  3. Compact and robust sensors with large offset distance
  4. Measuring rate up to 6 kHz for high speed measurements
  5. Robust controller with passive cooling
  6. Easy configuration via web interface
  7. Compact sensors also with 90° beam path
[{"activity":"US_ME_R0-NCSC","address":"8120 Brownleigh Dr.\r\nRaleigh, NC 27617","central":false,"comment":"CT, DC, DE, MA, MD, ME,\r\nNH, NJ, NY, PA, RI, VT","companyName":"Micro-Epsilon America | East Regional Office","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1811},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1653},"mobile":"919 400 3845","name":"Efrain Arredondo","phone1":"919 787 9707","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9295,"type":null,"uid":116,"usStates":"14,15,32,31,29,40,41,43,51,53,59,16","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R2-Mid-West","address":"1246 Woburn Dr\r\nLemont, IL 60439","central":false,"comment":"IL: 600-619,\r\nIN, KY, MI, OH,\r\nPA: 150-167,\r\nWI: 530-539, 541-545, 549, \r\nWV","companyName":"Micro-Epsilon America | Mid West Regional Office","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"630 243-0997","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1812},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1663},"mobile":"847 420 4781","name":"Steve Sochowski","phone1":"630 243-0980","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9296,"type":null,"uid":117,"usStates":"23,24,27,33,47,51,64,63","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R3-West","address":"San Clemente, CA 92673","central":false,"comment":"AK, CA, HI, NV, OR, WA","companyName":"Micro-Epsilon America | Western Regional Office","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1813},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1654},"mobile":"","name":"Jerry Carayanis","phone1":"310 729 0954","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9297,"type":null,"uid":118,"usStates":"2,12,21,39,49,62","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R4-South","address":"Denver, CO 80227","central":false,"comment":"AZ, CO, IA, ID,\r\nIL: 620-629, \r\nKS, LA, MN, MO, MT, ND, NE, NM, OK, SD, TX, UT,\r\nWI: 540, 546-548, \r\nWY","companyName":"Micro-Epsilon America | Central Regional Office","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1814},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1655},"mobile":"919 412 3620","name":"Friedrich \u0022Fritz\u0022 Gebessler","phone1":"","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9299,"type":null,"uid":119,"usStates":"4,13,25,22,23,26,28,34,36,37,45,38,42,48,55,57,58,64,65","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R5-Southeast","address":"8120 Brownleigh Dr.\r\nRaleigh NC 27617","central":false,"comment":"AL, AR, FL, GA, MS, NC, \r\nSC, TN, VA","companyName":"Micro-Epsilon America | South East Regional Office","countries":"220","deZip":"","email":"tim.prentice@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1815},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1656},"mobile":"","name":"Tim Prentice","phone1":"919 649 9805","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9300,"type":null,"uid":120,"usStates":"1,5,18,19,35,44,54,56,61","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R6-Northern","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)","companyName":"Micro-Epsilon America | Northern California Direct Office","countries":"220","deZip":"","email":"holger.kopp@micro-epsilon.de","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":61872},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":61871},"mobile":"","name":"Holger Kopp","phone1":"984 888 6555","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9301,"type":null,"uid":305,"usStates":"12","website":"www.micro-epsilon.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"IL","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"815 520-0344","name":"Tim Fauser","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9245,"type":null,"uid":162,"usStates":"23","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_TandM-Instruments","address":"15902 Soleil Ct\r\nAustin, TX 78734","central":false,"comment":"LA, OK, TX","companyName":"T\u0026M Instruments","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"512-532-6130","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"T\u0026M Instruments","phone1":"512-772-1553","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9246,"type":null,"uid":171,"usStates":"28,48,57","website":"www.tandm.net","worldwide":true},{"activity":"USREP_Process-Technology_NM","address":"3301 Wellington Place\r\nFarmington, NM 87402","central":false,"comment":"NM","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"505 948 3302","name":"Josh Gordon","phone1":"","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9247,"type":null,"uid":169,"usStates":"42","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Process-Technology","address":"4084 South 300 West\r\nSalt Lake City, UT 84107","central":false,"comment":"ID, MT, UT, WY","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"385 322 3053","name":"Mike Hallenbeck","phone1":"801 264 1114","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9248,"type":null,"uid":168,"usStates":"22,37,58,65","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Analectro","address":"3219 Route 38, Suite 2\r\nMt. Laurel, NJ 08054","central":false,"comment":"DC, DE, MD, NJ\r\nPA: 168 - 196","companyName":"Analectro","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"856 795 4597","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Al Reithmeier, Kevin Corcoran","phone1":"856 795 6676","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9249,"type":null,"uid":154,"usStates":"16,15,31,41,51","website":"www.analectro.com","worldwide":true},{"activity":"USREP_Dempsco","address":"7015 Corporate Way\r\nDayton, OH 45459","central":false,"comment":"KY, IN, WV, \r\nOH: 430-433, 437-459\r\nPA: 150-167","companyName":"Dempsco","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"937 434 8860","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Kurt Jacoby, Chris Jacoby","phone1":"937 436 1000","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9250,"type":null,"uid":160,"usStates":"27,24,63,47,51","website":"www.dempsco.com","worldwide":true},{"activity":"USREP_Preferred_Technical_Resources","address":"28525 Beck Road, Suite 109\r\nWixom, MI 48393","central":false,"comment":"MI, OH: 434 - 436","companyName":"Preferred Technical Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"248 668 9059","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Philip Theaker, John Callaghan","phone1":"248 668 9051","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9251,"type":null,"uid":167,"usStates":"33,47","website":"www.ptrsales.com","worldwide":true},{"activity":"USREP_MCT_RAM","address":"2 W Main St, Suite 300\r\nVictor, NY 14564","central":false,"comment":"NY 120 - 123, 128 - 149","companyName":"MCT\/RAM - Corporate Office","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585 461 2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Saporito","phone1":"585 461 2110","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9252,"type":null,"uid":165,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_MCT_RAM1","address":"4 Marina Lane\r\nE. Patchogue, NY 11772","central":false,"comment":"NY 100 - 119, 124 - 127","companyName":"MCT\/RAM - Lower New York and New York City","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585-461-2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Gustafson","phone1":"631-286-7374","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9253,"type":null,"uid":166,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"WI: 530 - 539, 541 - 545, 549","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"414- 458-9325","name":"Jon Korus","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9254,"type":null,"uid":163,"usStates":"64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_IRI","address":"13774 Reimer Drive North \r\nMaple Grove, MN 55311","central":false,"comment":"IA, KS, MN, MO, ND, NE, SD,\r\nWI: 540, 546 - 548","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"952 797 0223","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Tony Marquette","phone1":"952 797 0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9255,"type":null,"uid":164,"usStates":"25,26,34,36,45,38,55,64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_Equipoise","address":"4059 N Haight Ave\r\nPortland, OR 97227-1332","central":false,"comment":"OR, WA","companyName":"Equipoise Technologies, LLC","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Ed Querfeld","phone1":"503 708 9969","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9256,"type":null,"uid":161,"usStates":"49,62","website":"www.equipoisetech.com","worldwide":true},{"activity":"USREP_CASECO","address":"508 Queens Court\r\nFranklin, TN 37064","central":false,"comment":"AL, AR, MS, TN\r\nFL: 324 - 325","companyName":"CASECO","countries":"220","deZip":"","email":"tim.prentice@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"615 591-7399","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"615 210-7311","name":"Tim DiPeri","phone1":"615 591-7399","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9257,"type":null,"uid":159,"usStates":"1,5,35,56,18","website":"www.caseco-inc.com","worldwide":true},{"activity":"USREP_CAL_Industrial_Sales_Co","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)\r\nNV: 892 - 898","companyName":"CAL Industrial Sales Co.","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Dave Richardson, Bob McCartney","phone1":"925 371 8125","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9258,"type":null,"uid":158,"usStates":"39,12","website":"www.calindustrial.com","worldwide":true}]
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Absolute distance measurement with nanometer resolution

The IMS5400-DS is used for high-precision displacement and distance measurements. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.

Multi-peak distance measurement

With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. For example, the distance between glass and a carrier plate can be determined. In addition, the controller can calculate the glass thickness based on the distance values.

Ideal for industrial environments

Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and can also be integrated in confined spaces. Highly flexible fiber optic cables are available in lengths up to 10 m and allow a spatial separation of sensor and controller. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.

Small light spot for the smallest of details and structures

The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturized electronic components.

Measuring multiple surfaces

The interferometric measuring method enables measurements on numerous surfaces. This allows high-precision distance measurements on reflecting metals, plastics and glass.

NEW: Sensors also with 90° beam path

Due to their compact size, these sensors can also be integrated into restricted spaces. In particular, the models with 90° beam path require significantly less required installation space.

Numerous models for demanding measurement tasks

Model Measuring range /
Start of measuring range
Linearity Number of measurable layers
   
Fields of application
IMS5400-DS0,5/90/VAC 1,5 mm /approx. 0,5 mm ± 50nm - High-precision distance measurement in a clean room environment and vacuum, e.g. measurement on coated wafers.
Non-magnetic titanium UHV variant enables use in strong magnetic fields, e.g. in medical technology (nuclear spinning or electron beam microscope)
IMS5400-DS10/90/VAC 1,5 mm / 10 mm
IMS5400-DS19 2.1 mm / approx. 19 mm ±50 nm - Industrial distance measurements e.g. in precision manufacturing
IMS5400-DS19/VAC Precise positioning tasks and distance measurements in clean room environments and vacuum e.g. in display production for mask positioning
IMS5400MP-DS19 Distance measurement:
2.1 mm / approx. 19 mm
Thickness measurement:
0.01 ... 1.3 mm (for BK7, n=1.5) / approx. 19 mm
±50 nm for the first distance
±150 nm for each further distance
Up to 13 layers Industrial distance and thickness measurement e.g. in flat glass production
IMS5400MP-DS19/VAC Precise distance and thickness measurement in clean room environments and vacuum e.g. in display production for distance and gap measurement

Interface and signal processing units

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.

Tutorials