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High resolution and compactness

Next generation of confocal sensors

confocalDT

The world's largest sensor portfolio for precise measurement tasks

confocalDT

High-precision displacement and distance measurements on all surfaces

confocalDT

Proven worldwide in numerous fields: Industry, robotics and semiconductor/vacuum

confocalDT

Pioneering in confocal measurement technology

confocalDT

Ideal for automation and production monitoring

Confocal chromatic sensors

The confocalDT sensors product range stands for the highest precision and dynamics in confocal chromatic measurement technology. These sensors enable high-precision and fast measurements for both distance and thickness measurements of transparent objects. In addition, innovative controller and sensor technologies ensure high signal stability on all surfaces. The high-performance sensor portfolio enables the solution of a wide range of measurement tasks, e.g., in flat glass production, in measuring machines and in semiconductor machine construction. 

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Models

confocalDT IFD2411

Compact controller for series applications

Measuring range: 1 | 2 | 3 | 6 mm
Linearity: 0.5 µm
Measuring rate: 8 kHz
confocalDT IFD2410/2415

Compact sensors with integrated controller

Measuring range: 1 | 3 | 6 | 10 mm
Linearity: 0.25 µm
Measuring rate: 25 kHz
confocalDT IFC2421/22

Single or dual-channel controller for industrial applications

Measuring range: 0.3 | 1 | 2.5 | 3 | 10 mm
Linearity: 0.1 µm
Measuring rate: 10 kHz
confocalDT IFC2465/66

One / two-channel controller for fast & precise measurements

Measuring range: 0.3 | 1 | 2.5 | 3 | 6 | 10 mm
Linearity: 0.1 µm
Measuring rate: 30 kHz
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Characteristics

  1. Distance and thickness measurements with enormous resolution and measuring rate
  2. Ideal for automation and production monitoring
  3. Virtually surface-independent, even for mirrors and glass
  4. Extremely small, constant measurement spot for the finest details
  5. Nanometer-precise resolution
  6. Industrial-grade controller with ideal signal-to-noise ratio
  7. Passive measuring system, ideal for applications in a vacuum
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Highest precision in confocal chromatic displacement and thickness measurements

The confocalDT sensors product range stands for the highest precision and dynamics in confocal chromatic measurement technology. The sensors are used to solve a wide range of measurement tasks. 

High-precision distance measurement on all surfaces
Thickness measurement of transparent objects
Multi-peak thickness measurement of up to 5 layers
Two-sided thickness measurement with high precision

Largest sensor portfolio for precise measurements

The right sensor for every measurement task! Whether for confined installation spaces, for measurements on curved surfaces or for nanometer-precise measurements in the semiconductor industry: the confocalDT sensors are available in different series that impress in numerous applications.

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Next-generation sensors

The confocalDT IFD2415 and IFD2410 are powerful confocal sensors with integrated controller. The space-saving IP65 housing enables quick integration as no optical fiber is required. The sensors are ideally suited for high-precision distance and thickness measurements. The IFD2415 can also be used for multi-layer thickness measurements of up to 5 layers. The active exposure time control allows stable measurements on varying surfaces, even with dynamic processes of up to 25 kHz.

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High-resolution controllers for distance and thickness measurements

High resolution and speed: distance and thickness measurements with more precision

The confocalDT sensors provide an excellent signal-to-noise ratio enabling fast measurements at high accuracy. Thanks to their fast surface compensation, these sensors achieve extraordinary signal stability with varying surfaces.

Measurement of the smallest details and structures

Ultra-small light spot: measurement of the smallest details and structures

Confocal sensors from Micro-Epsilon generate the smallest of light spots <3 µm due to their high Numerical aperture (NA). Therefore, the finest details and structures can be detected reliably.

Confocal sensors with large tilt angle

Large tilt angle

The confocalDT IFS sensors tolerate a large tilt angle of up to 48°. Therefore, curved and structured surfaces can be detected reliably to generate stable signals.

Confocal sensors for vacuum applications

Use in a vacuum

The confocalDT sensors consist of passive components and do not emit any heat. Particularly for use in vacuum applications, Micro-Epsilon offers sensors, cables and accessories which are suitable for the respective specification (clean room, vacuum ultra-high vacuum UHV). Vacuum-compatible sensors are available with various measuring ranges and either axial or radial beam paths.

Robust optical fibers for industry, robotics and vacuum

Standard fiber optics
Standard fiber optics
Fiber optics suitable for drag chains
Fiber optics suitable for drag chains
Protective hose for mechanical stress
Protective hose for mechanical stress
Robot-compatible fiber optics
Robot-compatible fiber optics
Vacuum / UHV version
Vacuum / UHV version

Powerful on all surfaces

Shiny metals
Shiny metals
Glass
Glass
Black rubber
Black rubber
Curved lenses
Curved lenses

Ease of use via web interface

Due to a user-friendly web interface, no additional software is necessary to configure the controller and the sensors. The web interface can be accessed via Ethernet and provides set up and configuration options. For thickness measurements, materials are stored in an expandable materials database.

Laptop with web interface

Numerous interfaces for simple integration

Ideal for precise measurements in industrial applications

Thickness measurement of glass with just one sensor
Small sensor designs for measurement in confined spaces
Ideal for high-resolution measurements in the semiconductor industry
High-precision distance measurements in measuring machines

Video: Confocal chromatic sensors for distance and thickness measurements

Interfaces and signal processing units

IF2008/PCIE
IF2008/ETH
IF2035 for Industrial Ethernet

Application

Bottom thickness medical glass
Gap monitoring safety glass
Measuring heads coordinate measuring machine

Downloads

Catalogs and data sheets