Contact
Downloads

interferoMETER IMS5400-DS

Absolute distance measurements with maximum precision

interferoMETER IMS5400-TH

High precision thickness measurements of thinnest glass and films

interferoMETER IMS5600-DS

Absolute distance measurements with subnanometer resolution

High-precision white light interferometers for non-contact distance and thickness measurements

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 4 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution. The IMS5420-TH is used for wafer thickness measurement.

logo

Characteristics

  1. Absolute distance measurement with nanometer accuracy
  2. Precise thickness measurements independent of the distance from the sensor
  3. Multi-peak distance measurement and multi-layer thickness measurement
  4. Unmatched precision for industrial applications
  5. Best-in-Class: Resolution 30 picometers (IMS5600)
  6. High signal stability due to new evaluation algorithms and active temperature compensation
  7. Large offset distance
  8. Simple parameter set up via web interface
  9. Industry optimized sensors with robust metal housing and flexible cables
  10. Sensors and cables suitable for vacuum
[{"activity":"US_ME_R0-NCSC","address":"8120 Brownleigh Dr.\r\nRaleigh, NC 27617","central":false,"comment":"CT, DC, DE, MA, MD, ME,\r\nNH, NJ, NY, PA, RI, VT","companyName":"Micro-Epsilon America | East Regional Office","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1811},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1653},"mobile":"919 400 3845","name":"Efrain Arredondo","phone1":"919 787 9707","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9295,"type":null,"uid":116,"usStates":"14,15,32,31,29,40,41,43,51,53,59,16","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R2-Mid-West","address":"1246 Woburn Dr\r\nLemont, IL 60439","central":false,"comment":"IL: 600-619,\r\nIN, KY, MI, OH,\r\nPA: 150-167,\r\nWI: 530-539, 541-545, 549, \r\nWV","companyName":"Micro-Epsilon America | Mid West Regional Office","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"630 243-0997","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1812},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1663},"mobile":"847 420 4781","name":"Steve Sochowski","phone1":"630 243-0980","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9296,"type":null,"uid":117,"usStates":"23,24,27,33,47,51,64,63","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R3-West","address":"San Clemente, CA 92673","central":false,"comment":"AK, CA, HI, NV, OR, WA","companyName":"Micro-Epsilon America | Western Regional Office","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1813},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1654},"mobile":"","name":"Jerry Carayanis","phone1":"310 729 0954","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9297,"type":null,"uid":118,"usStates":"2,12,21,39,49,62","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R4-South","address":"Denver, CO 80227","central":false,"comment":"AZ, CO, IA, ID,\r\nIL: 620-629, \r\nKS, LA, MN, MO, MT, ND, NE, NM, OK, SD, TX, UT,\r\nWI: 540, 546-548, \r\nWY","companyName":"Micro-Epsilon America | Central Regional Office","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1814},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1655},"mobile":"919 412 3620","name":"Friedrich \u0022Fritz\u0022 Gebessler","phone1":"","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9299,"type":null,"uid":119,"usStates":"4,13,25,22,23,26,28,34,36,37,45,38,42,48,55,57,58,64,65","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R5-Southeast","address":"8120 Brownleigh Dr.\r\nRaleigh NC 27617","central":false,"comment":"AL, AR, FL, GA, MS, NC, \r\nSC, TN, VA","companyName":"Micro-Epsilon America | South East Regional Office","countries":"220","deZip":"","email":"tim.prentice@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1815},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1656},"mobile":"","name":"Tim Prentice","phone1":"919 649 9805","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9300,"type":null,"uid":120,"usStates":"1,5,18,19,35,44,54,56,61","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R6-Northern","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)","companyName":"Micro-Epsilon America | Northern California Direct Office","countries":"220","deZip":"","email":"holger.kopp@micro-epsilon.de","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":61872},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":61871},"mobile":"","name":"Holger Kopp","phone1":"984 888 6555","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":9301,"type":null,"uid":305,"usStates":"12","website":"www.micro-epsilon.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"IL","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"815 520-0344","name":"Tim Fauser","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9245,"type":null,"uid":162,"usStates":"23","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_TandM-Instruments","address":"15902 Soleil Ct\r\nAustin, TX 78734","central":false,"comment":"LA, OK, TX","companyName":"T\u0026M Instruments","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"512-532-6130","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"T\u0026M Instruments","phone1":"512-772-1553","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9246,"type":null,"uid":171,"usStates":"28,48,57","website":"www.tandm.net","worldwide":true},{"activity":"USREP_Process-Technology_NM","address":"3301 Wellington Place\r\nFarmington, NM 87402","central":false,"comment":"NM","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"505 948 3302","name":"Josh Gordon","phone1":"","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9247,"type":null,"uid":169,"usStates":"42","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Process-Technology","address":"4084 South 300 West\r\nSalt Lake City, UT 84107","central":false,"comment":"ID, MT, UT, WY","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"385 322 3053","name":"Mike Hallenbeck","phone1":"801 264 1114","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9248,"type":null,"uid":168,"usStates":"22,37,58,65","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Analectro","address":"3219 Route 38, Suite 2\r\nMt. Laurel, NJ 08054","central":false,"comment":"DC, DE, MD, NJ\r\nPA: 168 - 196","companyName":"Analectro","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"856 795 4597","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Al Reithmeier, Kevin Corcoran","phone1":"856 795 6676","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9249,"type":null,"uid":154,"usStates":"16,15,31,41,51","website":"www.analectro.com","worldwide":true},{"activity":"USREP_Dempsco","address":"7015 Corporate Way\r\nDayton, OH 45459","central":false,"comment":"KY, IN, WV, \r\nOH: 430-433, 437-459\r\nPA: 150-167","companyName":"Dempsco","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"937 434 8860","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Kurt Jacoby, Chris Jacoby","phone1":"937 436 1000","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9250,"type":null,"uid":160,"usStates":"27,24,63,47,51","website":"www.dempsco.com","worldwide":true},{"activity":"USREP_Preferred_Technical_Resources","address":"28525 Beck Road, Suite 109\r\nWixom, MI 48393","central":false,"comment":"MI, OH: 434 - 436","companyName":"Preferred Technical Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"248 668 9059","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Philip Theaker, John Callaghan","phone1":"248 668 9051","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9251,"type":null,"uid":167,"usStates":"33,47","website":"www.ptrsales.com","worldwide":true},{"activity":"USREP_MCT_RAM","address":"2 W Main St, Suite 300\r\nVictor, NY 14564","central":false,"comment":"NY 120 - 123, 128 - 149","companyName":"MCT\/RAM - Corporate Office","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585 461 2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Saporito","phone1":"585 461 2110","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9252,"type":null,"uid":165,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_MCT_RAM1","address":"4 Marina Lane\r\nE. Patchogue, NY 11772","central":false,"comment":"NY 100 - 119, 124 - 127","companyName":"MCT\/RAM - Lower New York and New York City","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585-461-2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Gustafson","phone1":"631-286-7374","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9253,"type":null,"uid":166,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"WI: 530 - 539, 541 - 545, 549","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"414- 458-9325","name":"Jon Korus","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9254,"type":null,"uid":163,"usStates":"64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_IRI","address":"13774 Reimer Drive North \r\nMaple Grove, MN 55311","central":false,"comment":"IA, KS, MN, MO, ND, NE, SD,\r\nWI: 540, 546 - 548","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"952 797 0223","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Tony Marquette","phone1":"952 797 0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9255,"type":null,"uid":164,"usStates":"25,26,34,36,45,38,55,64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_Equipoise","address":"4059 N Haight Ave\r\nPortland, OR 97227-1332","central":false,"comment":"OR, WA","companyName":"Equipoise Technologies, LLC","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Ed Querfeld","phone1":"503 708 9969","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9256,"type":null,"uid":161,"usStates":"49,62","website":"www.equipoisetech.com","worldwide":true},{"activity":"USREP_CASECO","address":"508 Queens Court\r\nFranklin, TN 37064","central":false,"comment":"AL, AR, MS, TN\r\nFL: 324 - 325","companyName":"CASECO","countries":"220","deZip":"","email":"tim.prentice@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"615 591-7399","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"615 210-7311","name":"Tim DiPeri","phone1":"615 591-7399","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9257,"type":null,"uid":159,"usStates":"1,5,35,56,18","website":"www.caseco-inc.com","worldwide":true},{"activity":"USREP_CAL_Industrial_Sales_Co","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)\r\nNV: 892 - 898","companyName":"CAL Industrial Sales Co.","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"me-usa@micro-epsilon.com","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Dave Richardson, Bob McCartney","phone1":"925 371 8125","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":9258,"type":null,"uid":158,"usStates":"39,12","website":"www.calindustrial.com","worldwide":true}]
Contact
Micro-Epsilon USA Headquarters
Contact form
Your request for: {product}
* Mandatory fields
Click here to read our data privacy statement.

Interferometer for industry and automation

The industrial white light interferometer consists of a robust sensor, a highly flexible sensor cable and a controller in an aluminum housing that can be mounted on a DIN rail. The controller has an active temperature control, which compensates for changes in the ambient temperature and thus achieves an enormous temperature stability. Thanks to its robust design, the interferometer can also be integrated in industrial environments. Cable lengths up to 10 m also allow a spatial separation of sensor and controller. For measurement tasks in clean rooms and in vacuum, vacuum-suitable sensors, cables and cable feed-through accessories are available.

logo

Extreme z resolution and small light spot enable measurements of smallest of details and structures

The interferometer sensors enable a sub-nanometer resolution. In addition, they generate a 10 µm light spot over the entire measuring range. This allows the measurement of small details such as structures on semiconductors and miniaturized electronic components. The light spot is visualized by a pilot laser and facilitates the alignment of the sensor.

New sensor models with different designs

New sensors with different designs and properties are available for the integration in demanding environments. Due to their 90° beam path, both the IMP-DS0.5/90/VAC and the IMP-DS10/90/VAC can also be mounted in low installation spaces. The new IMP-DS1/VAC miniature sensor is one of the smallest optical sensors from Micro-Epsilon. With a diameter of 4 mm and an integrated cable, the sensor can also be used in extremely confined installation spaces. Sensors and cables can be used both in the clean room and in a vacuum.

Patented pilot laser for easy sensor positioning

White light interferometers use infrared light in the non-visible range (approx. 840 nm wavelength), which means that the measurement position cannot be seen. To visualize the measuring position, Micro-Epsilon systems are equipped with a pilot laser which projects a light spot onto the measuring position. In addition, the pilot laser uses a patented method to provide feedback on the distance in addition to the measurement position. If the measuring object is at the correct distance and within the measuring range, a constant glow is emitted by the pilot laser. If the measuring object is outside the measuring range, the pilot laser flashes.

Adjustable mounting adapter for sensor alignment

To achieve maximum accuracy, the interferometers must be aligned as perpendicular as possible to the target. With the adjustable mounting adapter, the sensors can be optimally aligned to the measuring object. You can also align the sensor after the installation in the machine. The industrial adapter allows the displacement in the x- and y-axes as well as tilting the sensor to the measuring object.

New: Adjustable mounting adapter for two-sided thickness measurement

The JMA-Thickness consists of two adjustable mounting adapters, and supports the alignment of sensors in two-sided thickness measurements. This means that the measuring points can be arranged absolutely congruent on an optical axis, which ensures reliable thickness measurements with highest precision. The JMA-Thickness is ideal for the integration into machines and production plants. The preassembled mounting plates allow quick and easy installation.

Ease of use via web interface

Due to a user-friendly web interface, no additional software is necessary to configure the controller and the sensors. The web interface is accessible via Ethernet connection and enables quick and easy setting of, e.g., averaging, measuring rate and presets.

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.

Application

Tutorials