Eddy current sensors for displacement and position

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	Measuring ranges	Resolution	Linearity
Compact eddy current sensor system	0.5 - 15 mm	0.005 % F.S.O.	± 0.25 % F.S.O.
Compact eddy current sensor system	0.4 - 80 mm	0.005 % F.S.O.	± 0.2 % F.S.O.
Compact eddy current sensor system (single or dual-channel)	1 - 6 mm	0.000018 % F.S.O.	± 5 % F.S.O.
Non-contact inductive displacement sensors	3 - 16 mm	0.5 % F.S.O.	± 2 % F.S.O.
Specific eddy current sensors

Eddy current sensors measure distances, displacements, or positions of any electrically-conductive target. Eddy current sensors from Micro-Epsilon are ideally suited for applications in harsh industrial environments (pressure, dust, temperature). Furthermore, the eddy current sensors are integrated in semiconductor applications where nano-accuracy is demanded.