Capacitive hybrid sensors measure the movement of a test item in atomic force microscopes at an ambient temperature of 4K. In doing so, a surface topography with nanometre resolution is produced. Two capaNCDT CSH-FL series sensors measure the positioning in the X and Y axes. For this, the test item is cooled down to 4K with liquid helium. The sensors achieve nanometre resolution both at room temperature and where strong electromagnetic fields are present, in ultra-high vacuums and close to absolute zero temperature. Special materials were used in the development of these hybrid sensors, which enable the units to withstand these extreme, harsh environments.