Compact confocal chromatic sensors for precise displacement and thickness measurement

Measuring rangesHelpIcon ResolutionHelpIcon LinearityHelpIcon
IFS2406.jpg (2 KB)) Compact confocal chromatic sensors for precise displacement and thickness measurement 2.5 - 10 mm 0.001 % F.S.O. ± 0.03 % F.S.O.
FSO = of full scale output

Details

• Measuring ranges (mm):
2.5|10
•  Linearity max. 0.75µm
•  Resolution max. 0.024µm
•  Distance and one-sided thickness measurement
•  Small light spot
•  Vacuum compatible sensor
back to product group "Confocal sensors"
 
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